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Fabrication of light-turning mirrors in buried-channel silica waveguides for monolithic and hybrid integration

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4 Author(s)
Bazylenko, M.V. ; Sch. of Electr. Eng., Sydney Univ., NSW, Australia ; Gross, M. ; Gauja, E. ; Chu, P.L.

A technique for incorporating a mirror into the core of a silica-based channel waveguide is described. Both up reflecting mirrors for hybrid integration and down-reflecting mirrors for monolithic integration can be fabricated using this technique. The proposed fabrication method is based on a combination of low temperature hollow cathode PECVD for silica-based waveguide deposition and a novel technique for forming a reflecting facet by wet chemical etching of PECVD silica

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Lightwave Technology, Journal of  (Volume:15 ,  Issue: 1 )