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Analog type millimeter wave phase shifters based on mems tunable high-impedance surface in rectangular metal waveguide

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6 Author(s)
D. Chicherin ; Aalto University, Espoo, Finland ; M. Sterner ; J. Oberhammer ; S. Dudorov
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Possibility of compact low loss analog type millimeter wave phase shifter was demonstrated. The phase shifter is controlled by a MEMS tunable high-impedance surface placed, e.g., as a backshort or as sidewall inclusions of a rectangular metal waveguide. Reflection type phase shifter can provide differential analog phase shift from 0 deg. to up to 240 deg. Reliable and tunable MEMS based high-impedance surface has been demonstrated for the first time. The insertion loss of the fabricated MEMS tunable high-impedance surface varies from 0.7 dB to a maximum of 3.5 dB (at a resonance frequency), which is a dramatic improvement over our previous non-tunable prototype.

Published in:

Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International

Date of Conference:

23-28 May 2010