Dynamic Analysis Method of Spiral Resonant Actuator Using 3-D FEM

This paper proposes a dynamic analysis method for a novel spiral resonant actuator with two-degree-of-freedom employing the 3-D finite element method (FEM). The effects of the slit structure on the performance of the actuator are quantitatively clarified using this method. Furthermore, the effectiveness of calculated results is verified through the comparison with the measured ones.