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Mixed signal components are increasingly used to implement controlling loops and digital signal processors in automotive applications. Successive Approximation Register (SAR) analog-to-digital converters based on switched capacitors play a major role in this evolution. Since the defectivity of the intermetal dielectric in vertical parallel plate capacitors is a major concern of this technology, dedicated screening techniques are needed to implement “zero defects” strategies. A novel screening approach is proposed in this paper, which is based on the use of a dedicated embedded circuitry with very low area consumption. A design is presented, which includes the control logic, the high voltage generation, and the leakage detection circuitry. The concept, advantages and the circuits for the proposed built-in reliability test are described in detail and illustrated by layout and circuit simulations.