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Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method

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4 Author(s)
Hashim, U. ; Nano BioChip Res. Group, Univ. Malaysia Perlis (UniMAP), Kangar, Malaysia ; Salleh, S. ; Emi Azri Shohini ; Abd Rahman, S.F.

The use of Silicon nanowires has allowed the introduction of many new signal transduction technologies in biosensors. The sensitivity and performance of biosensors is being improved by using doping process for their construction. This research presents the design and fabrication of a Silicon nanowire for deoxyribonucleic acid (DNA) hybridization detection using electrodes made of nanowires whose width is comparable to the size of a DNA molecule. During hybridization, DNA change from single stranded DNA (ssDNA) to double stranded DNA (dsDNA) cause the change of charge density of molecules structure. Fabrication of a Silicon nanowire (NW) using spacer patterning lithography (SPL) techniques is addressed and characterization of its conductivity altogether with capacitance effect is discussed in this research.

Published in:

Electronic Manufacturing Technology Symposium (IEMT), 2008 33rd IEEE/CPMT International

Date of Conference:

4-6 Nov. 2008