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Radon-Transform-Based Image Enhancement for Microelectronic Chip Inspection

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4 Author(s)
Gur, E. ; Shenkar Coll. of Eng. & Design, Ramat Gan, Israel ; Weizman, Y. ; Perdu, P. ; Zalevsky, Z.

In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

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Device and Materials Reliability, IEEE Transactions on  (Volume:10 ,  Issue: 3 )