Radon-Transform-Based Image Enhancement for Microelectronic Chip Inspection

In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.