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Vacuum electronic (VE) power amplifiers are being developed between 100 GHz and 1 THz. Minimum power goals are 50 watts at 220 GHz, and 100 mW at 670 GHz. These devices will use advanced, high current density cathodes, a folded waveguide as the slow-wave circuit, and a depressed collector for overall device efficiency. Operation at duty cycles of 50-100% is anticipated.