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6.6: Emission imaging of a single crystal LaB6 cathode surface

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2 Author(s)
Magera, G.G. ; Appl. Phys. Technol., Inc., McMinnville, OR, USA ; Katsap, V.

LaB6 cathode is still the emitter of choice in a variable-shape beam (VSB) electron beam lithography tool. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Though generally stable, this crystalline plane is sensitive to residual atmosphere, and it may have microscopic defects (inclusions, dislocations, etc.) which appear and evolve over the time. Routine initial microscopic inspection of LaB6 cathodes gives us an initial optical/SEM image of surface, which may change during cathode life. With a simple technique, we have obtained LaB6 cathode emission images, which showed features unavailable to optical and electron microscopy. This technique can be used for LaB6 quality evaluation during standard cathode test runs.

Published in:

Vacuum Electronics Conference (IVEC), 2010 IEEE International

Date of Conference:

18-20 May 2010