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9.3: Fabrication of solid copper 220 GHz folded waveguide circuits by UV lithography

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7 Author(s)
Makarova, O.V. ; Creatv MicroTech, Inc., Chicago, IL, USA ; Divan, R. ; Tucek, J. ; Kreischer, K.
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We report the fabrication results for an all-copper 220 GHz folded waveguide circuit. The fabrication method is based on UV lithography using SU-8 negative photoresist followed by copper electroforming. The method achieved the necessary dimensional accuracy, smooth vertical side walls, low cost of fabrication, and all-copper structure suitable for high power applications.

Published in:

Vacuum Electronics Conference (IVEC), 2010 IEEE International

Date of Conference:

18-20 May 2010