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A systematic device qualification methodology for wafer fab process technology

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2 Author(s)

To transfer a manufacturing process technology from one wafer fab to another fabrication plant is a complex exercise in today's world of semiconductor. The fabrication of a semiconductor component, depending on the product type, requires a series of diffusion, photo-etch and metallization among other processes.

Published in:

2010 International Conference on Electronic Devices, Systems and Applications

Date of Conference:

11-14 April 2010