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Electrical conductivity characteristics of TiO2 thin film

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4 Author(s)
Sarah, M.S.P. ; Solar Cell Lab., UiTM, Shah Alam, Malaysia ; Musa, M.Z. ; Asiah, M.N. ; Rusop, M.

Titanium Dioxide (TiO2) thin film has been synthesized using sol-gel method and deposited onto glass substrates using spin coating technique. These thin films are then annealed at various temperatures. The electrical and structural characterizations of the as deposited and annealed films were carried out using IV measurement with 4-point probe equipment and scanning electron microscopy (SEM). From this study, it is known that, electrical properties were influenced by changes of annealing temperature. Resistivity of thin films was found to decrease as the annealing temperatures increase. Also indicate in this paper the surface morphology of the thin film.

Published in:

Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on

Date of Conference:

11-14 April 2010