Three different type of materials i.e Au, Pt, and Pd have been investigated as metal contact on Titanium Dioxide (TiO2) thin films. These metal contacts have been deposited using sputter coating method. Meanwhile sol-gel spin coating method has been chosen to deposits TiO2 thin film. The ohmic contact characteristic of the three materials has been studied using Current-Voltage measurement.
Published in:
Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
Date of Conference: 11-14 April 2010