We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.
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Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Date of Conference: 16-21 May 2010