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Optical coatings for MEMS devices

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1 Author(s)
Michael A. Helmbrecht ; Iris AO, Inc., 2680 Bancroft Way, Berkeley, CA 94704, USA

Microelectromechanical systems (MEMS) devices pose unique constraints for optical coatings. This paper discusses issues unique to coating MEMS devices and describes design changes necessary to coat a deformable mirror with 99.9% reflective dielectric coatings at 532 nm.

Published in:

Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on

Date of Conference:

16-21 May 2010