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Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications

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6 Author(s)
Beardslee, L.A. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Addous, A.M. ; Heinrich, S. ; Josse, F.
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Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this letter, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 4 )

Date of Publication:

Aug. 2010

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