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Loss Measurement of Aluminum Thin-Film Coplanar Waveguide (CPW) Lines at Microwave Frequencies

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4 Author(s)
Ramazani, M. ; Thin Film & Nanoelectron. Lab., Univ. of Tehran, Tehran, Iran ; Miladi, H. ; Shahabadi, M. ; Mohajerzadeh, S.

To investigate coplanar waveguide (CPW) attenuation in monolithic microwave integrated circuits, measurements are carried out within 15-26 GHz on several CPW resonators with different metal thicknesses ranging from 200 to 2300 nm. In these experiments, the thin metal layers are made of aluminum. We will present a method for extracting the quality factor from the measured S-parameters of the CPW resonators.

Published in:
Electron Devices, IEEE Transactions on  (Volume:57 ,  Issue: 8 )

Date of Publication: Aug. 2010

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