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To investigate coplanar waveguide (CPW) attenuation in monolithic microwave integrated circuits, measurements are carried out within 15-26 GHz on several CPW resonators with different metal thicknesses ranging from 200 to 2300 nm. In these experiments, the thin metal layers are made of aluminum. We will present a method for extracting the quality factor from the measured S-parameters of the CPW resonators.
Date of Publication: Aug. 2010