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3D interconnection process development and integration with low stress TSV

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13 Author(s)
Chua, T.T. ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Ho, S.W. ; Li, H.Y. ; Khong, C.H.
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The 3 D interconnect technology with Thru Silicon Via (TSV) have gained tremendous advancement in recent years. Final adoption of TSV technologies requires a robust and cost competitive TSV processes. Sidewall plated TSV with polymer filling can reduce half of total process steps from TSV copper (Cu) seed deposition to front-via1 expose. TSV plating time can be reduced ~ 60% for sidewall plated TSV with polymer filling. Costly Cu removal process through chemical mechanical polishing (CMP) can be skipped in sidewall plated TSV with polymer filling process. Wafer warpage and bow for sidewall plated TSV with polymer filling were shown to be ~70% and ~94%, respectively lower than solid Cu filled TSV. Thermal-mechanical simulation show 20% and 42% reduction of shear and bending stress respectively in the case of sidewall plated TSV with polymer filling.

Published in:

Electronic Components and Technology Conference (ECTC), 2010 Proceedings 60th

Date of Conference:

1-4 June 2010