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Array of biomimetic hair sensor dedicated for flow pattern recognition

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6 Author(s)
Ahmad Dagamseh ; MESA+ & IMPACT Research Institutes, University of Twente, 7500 AE, P.O. Box 217, Enschede, The Netherlands ; Christiaan Bruinink ; Marcel Kolster ; Remco Wiegerink
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Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multiplexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.

Published in:

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Date of Conference:

5-7 May 2010