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Wide range tuneable components are a key point for High Frequency performances. We have developed a novel RF MEMS Capacitor based on surface variation and high displacement. This paper will present multiple Designs with physical parameter variations for comparative test with Fabricated Device Measurements. The goal of this work is to define a good approximation of the measures to further design devices with Target performances. The main parameters will be the tuneability, Capacitance value, the resonance frequency and finally the maximal actuation voltage allowed.
Date of Conference: 5-7 May 2010