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Multilayered magneto-impedance microsensors for non destructive control

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4 Author(s)
Moulin, J. ; IEF, Univ. Paris Sud XI, Orsay, France ; Woytasik, M. ; Shahosseini, I. ; Alves, F.

Magnetic field microsensors based on the magneto-impedance phenomenon have been fabricated by stacking up ferromagnetic/conductive/ferromagnetic films. Their sensitivity is in the same range than macroscopic devices (i.e. 400 V/T/A) and is constant from 0 to 500 A m-1. The ferromagnetic layer is a Finemet® alloy. Initially an amorphous material, it is nanocrystallized by heat treatment. Its magnetic properties have been optimized in order to induce transversal anisotropy.

Published in:

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Date of Conference:

5-7 May 2010