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HF performance characterization and prediction of 2D redistribution layer interconnects in a 3D-integrated circuit stack

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7 Author(s)
Roullard, J. ; IMEP-LAHC, Univ. Savoie, Le Bourget du Lac, France ; Capraro, S. ; Lacrevaz, T. ; Cadix, L.
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Effects due to 3D level stack on HF propagation performance of 2D interconnects integrated in the Back End Of Line (BEOL) or realized on the back face of a reported silicon substrate are investigated. The impact of silicon substrate on propagation exponents and delays is pointed out for 2D interconnects used as redistribution lines between stacked chips. In a first part, HF simulation and measurement results are compared to validate electrical models of interconnects. In the second part, a parametric study is performed in order to predict and optimize performances of 2D interconnects for different processes of 3D stacking.

Published in:

Signal Propagation on Interconnects (SPI), 2010 IEEE 14th Workshop on

Date of Conference:

9-12 May 2010