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FBAR Sensor Array for in Liquid Operation

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4 Author(s)
Enlund, J. ; Dept. of Solid State Electron., Uppsala Univ., Uppsala, Sweden ; Martin, D.M. ; Yantchev, V. ; Katardjiev, I.

This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.

Published in:

Sensors Journal, IEEE  (Volume:10 ,  Issue: 12 )