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Improvement of resistance switching characteristics in a thin FeOx transition layer of TiN/SiO2/FeOx/FePt structure by rapid annealing

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9 Author(s)
Feng, Li-Wei ; Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsin-Chu 300, Taiwan ; Chun-Yen Chang ; Chang, Yao-Feng ; Chang, Ting-Chang
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In this paper, the influence of a 600 °C rapid thermal annealing for 60 s on the improvements of resistance switching behaviors in a TiN/SiO2/FeOx/FePt structure is reported. It is found that besides the distinct reduction in memory switching parameters in forming voltage, set/reset voltages, and their dispersions, the resistance ratio of high-resistance state to low-resistance state is also enlarged after annealing. The effects of annealing on improving the resistance switching properties are discussed by x-ray diffraction and x-ray photon-emission spectra depth profile results. Additionally, good retention characteristics are exhibited in the annealed TiN/SiO2/FeOx/FePt resistance switching memory.

Published in:

Applied Physics Letters  (Volume:96 ,  Issue: 22 )

Date of Publication:

May 2010

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