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Fabrication of buried channel waveguides in fused silica using focused MeV proton beam irradiation

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2 Author(s)
Roberts, A. ; Sch. of Phys., Melbourne Univ., Parkville, Vic., Australia ; von Bibra, M.L.

Low-loss channel waveguides have been fabricated in fused silica using a beam of MeV protons focused down to a spot size of several microns. By using a combination of beam and sample scanning, single- and multimode graded index waveguides with lateral dimensions down to approximately 5 μm×5 μm have been fabricated using ion doses in the range (3×1014)-(6×1016) ions/cm 2. Typical beam currents in the range 100 pA-10 nA were used. Optical mode profiles have been measured at 670 nm and propagation losses of the order of 3 dB/cm measured in unannealed samples. Annealing the substrate for 1 h at 500°C reduced these losses to below 0.5 dB/cm

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Lightwave Technology, Journal of  (Volume:14 ,  Issue: 11 )