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This paper deals with optimum design criteria of miniature type linear servo motor of precise pick & place module for cogging force reduction using response surface methodology (RSM) & finite element method (FEM). The focus of this paper is to find a design solution through the comparison of cogging force according to core shape variations. And then, a central composite design (CCD) mixed resolution is introduced, and analysis of variance (ANOVA) is conducted to determine the significance of the fitted regression model. The proposed procedure allows to define the machine dimensions starting from an existing motor or a preliminary design. To prove the propriety of the proposed method, the Digital Signal Processor (DSP) installed experimental devices are equipped and the experiment is performed.