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Transportable distance measurement system based on superheterodyne interferometry using two phase-locked frequency-doubled Nd:YAG lasers

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6 Author(s)
Azouigui, S. ; Laboratoire Commun de Métrologie LNE-CNAM, 61 rue du Landy, Saint-Denis 93210, France ; Badr, T. ; Wallerand, J.-P. ; Himbert, M.
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We describe a transportable distance measurement system based on synthetic wavelength interferometry. Two frequency-doubled Nd:yttrium aluminum garnet lasers at 532 nm are used to generate a synthetic wavelength of ∼2.5 cm. A nonpolarizing interferometric system has been set up to eliminate polarization cross-talk issue. A superheterodyne detection was performed to measure the synthetic phase and to determine absolute distances. The capability to achieve fringe interpolation of 2π/5600 has been demonstrated and an agreement in distance measurement at the 4 μm level has been achieved, compared to an optical interferometric 3 m long displacement bench.

Published in:

Review of Scientific Instruments  (Volume:81 ,  Issue: 5 )

Date of Publication:

May 2010

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