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Growth, microstructure, and field-emission properties of synthesized diamond film on adamantane-coated silicon substrate by microwave plasma chemical vapor deposition

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2 Author(s)
Tiwari, Rajanish N. ; Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan 300, Republic of China ; Chang, Li

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Diamond nucleation on unscratched Si surface is great importance for its growth, and detailed understanding of this process is therefore desired for many applications. The pretreatment of the substrate surface may influence the initial growth period. In this study, diamond films have been synthesized on adamantane-coated crystalline silicon {100} substrate by microwave plasma chemical vapor deposition from a gaseous mixture of methane and hydrogen gases without the application of a bias voltage to the substrates. Prior to adamantane coating, the Si substrates were not pretreated such as abraded/scratched. The substrate temperature was ∼530 °C during diamond deposition. The deposited films are characterized by scanning electron microscopy, Raman spectrometry, x-ray diffraction, and x-ray photoelectron spectroscopy. These measurements provide definitive evidence for high-crystalline quality diamond film, which is synthesized on a SiC rather than clean Si substrate. Characterization through atomic force microscope allows establishing fine quality criteria of the film according to the grain size of nanodiamond along with SiC. The diamond films exhibit a low-threshold (55 Vm) and high current-density (1.6 mA/cm2) field-emission (FE) display. The possible mechanism of formation of diamond films and their FE properties have been demonstrated.

Published in:

Journal of Applied Physics  (Volume:107 ,  Issue: 10 )

Date of Publication:

May 2010

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