By Topic

A Miniature Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Photoacoustic Imaging

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Xiaoyang Cheng ; Electr. & Comput. Eng. Dept., Univ. of New Mexico, Albuquerque, NM, USA ; Jingkuang Chen ; Chuan Li

This paper describes the development of a capacitive micromachined ultrasonic transducer (CMUT) array for minimally invasive photoacoustic imaging (PAI). Integrated on a miniature silicon bar that is approximately 100 μm thick and 2.8-5 mm × 8-18 mm in area, this CMUT array can be implanted into a tissue or placed inside an organ without causing major tissue disruption. Close proximity to the target tissue allows this CMUT array to pick up a relatively weak ultrasound signal generated in a photoacoustic process and to provide diagnostic information inaccessible from a noninvasive transducer. For invasive PAI, silicon-based CMUTs offer an additional significant advantage: The silicon and the dielectric membrane of CMUTs are relatively transparent to near infrared, and the shadowing problem associated with the piezoelectric ultrasonic transducers can be minimized or avoided. A two-layer polysilicon surface micromachining process was used to fabricate this device, followed by a double-sided deep-silicon-etching process for shaping the silicon substrate into a thin probe. Experimental characterization found that the center frequency of the CMUT devices with a 46-μm-diameter 1.0-μm-thick polysilicon membrane was 5.0 MHz, with a fractional bandwidth of 116% in reception mode. The PAI of the nerve cord of a lobster using this miniature CMUT array was demonstrated.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 4 )