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High-Quality Factor Ni-Zn Ferrite Planar Inductor

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9 Author(s)
Jae-Jin Lee ; Dept. of Electr. & Comput. Eng., Univ. of Alabama, Tuscaloosa, AL, USA ; Hong, Yang-Ki ; Seok Bae ; Ji-Hoon Park
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Ferrite and air-core planar inductor arrays were fabricated on 4 inch Si wafer to characterize inductor performance. Three micron thick Ni0.5Zn0.5Fe2O4 film was deposited by a low temperature electrophoresis ferrite deposition process. All ferrite inductors in the array showed 35% higher inductance (L) and 130% higher quality factor (Q) than air-core inductor. The maximum Q of ferrite inductor was found to be 53 at 2 MHz. The superimposed DC current and the rated power were measured to be about 3 A and 15 W, respectively, for a 5% drop in L. The fabricated ferrite inductor has a higher current capability than the air-core inductor. In addition, the power efficiency of the buck DC-DC converter was predicted to be 94.3% at 1.93 W.

Published in:
Magnetics, IEEE Transactions on  (Volume:46 ,  Issue: 6 )

Date of Publication: June 2010

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