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Lithium Niobate Ridge Waveguides Fabricated by Ion Implantation Followed by Ion Beam Etching

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5 Author(s)
Jin-Hua Zhao ; Sch. of Phys., Shandong Univ., Jinan, China ; Xiu-Hong Liu ; Qing Huang ; Peng Liu
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A new fabrication method for lithium niobate ridge waveguides is reported. Lithium niobate ridge waveguide with a smooth surface was fabricated by O+ ions implanted combined with Ar ion beam etching. The beam propagation method (BPM) was used to simulate the properties of planar and ridge waveguides by use of a reconstructed refractive index profile. The simulation results match to the experimental results very well, and the loss value of the ridge waveguide is about 2 dB/cm.

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Lightwave Technology, Journal of  (Volume:28 ,  Issue: 13 )