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Large rotation angle micromirror based on hypocycloidal electrothermal actuators

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3 Author(s)
Xu, Y. ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Singh, J. ; Chen, N.

A large rotation angle micromirror using hypocycloidal electrothermal actuators (HEAs) is presented. The mechanical rotation angle of the micromirror is ~35?? at 2.6 V in nonresonant mode. The Cr/Au coated square mirror plate is supported by two groups of HEAs in order to achieve single axis rotation. Four Al/Si bimorph structures are staggerly connected in parallel to form a HEA. This structure is experimentally demonstrated to increase the deflection angle. Moreover, the rotation axis keeps still and there is no lateral shifting effect. The -3 dB cutoff frequency was found to be about 29 Hz as the large signal frequency response.

Published in:

Electronics Letters  (Volume:46 ,  Issue: 10 )