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Design and Tests of a 13-kA/6.5-kV Thyristor Switch for a Pulsed Inductive Plasma Source

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5 Author(s)
Christian James Teske ; Plasmaphysics Group, Institute of Applied Physics, Goethe University, Frankfurt am Main, Germany ; Byung-Joon Lee ; Andreas Fedjuschenko ; Joachim Jacoby
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In this paper, the design, construction, and test procedure of a closing-switch prototype based on thyristors are described. In particular, details are given about the design criteria and the triggering board architecture, which is a high-side-biased self-supplied unit using electrical energy derived from a local snubber network for the gate drive. The structure guarantees a hard firing gate pulse for the required high-dI/dt application. Furthermore, the results of the prototype tests are presented and discussed. The stack assembly has a holding voltage of 6.5 kV and is used for switching a series resonant circuit with a ringing frequency of 12 kHz for a pulsed inductive plasma source. Maximum current amplitudes of 13 kA and pulse energies of more than 600 J were switched during the test procedure.

Published in:

IEEE Transactions on Plasma Science  (Volume:38 ,  Issue: 7 )