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Dynamic Characterization Analysis System Based on Optical Measuring Methods

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2 Author(s)
Yan Bian ; Dept. of Autom. Eng., Tianjin Univ. of Technol. & Educ., Tianjin, China ; Tong Guo

Optical measuring methods are usually characteristic of fast, non-contact and high precision. This paper introduces a dynamic characterization analysis system of micro-electromechanical systems (MEMS) based on optical measuring methods. The system employed stroboscopic illumination, optical flow technology and microscopic interferometry to realize the measurement of in-plane and out-of-plane motions of a micro-machined lateral resonator. The experiments demonstrate the effectiveness of the system. This research can provide reliable experimental data feedback to the process of design and fabrication of movable MEMS devices.

Published in:

2010 International Conference on Measuring Technology and Mechatronics Automation  (Volume:2 )

Date of Conference:

13-14 March 2010