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Design of the Optical Fiber MEMS Infrasound Sensor

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3 Author(s)
Jiang Bingli ; Coll. of Optoelectron. Sci. & Eng., Huazhong Univ. of Sci. & Technol., Wuhan, China ; Yang Kuntao ; Wang Jiangan

An optical fiber infrasound sensor based on Microelectromechanical System (MEMS) is designed in this paper. Static performance of several sizes of membranes which are the core elements of the infrasound sensor are simulated with Finite Element modeling, and the results of strain gradients are shown. The relation expression between displacement of membrane and light intensity is deduced. The value of every parameter which will be used during the sensor fabrication through numerical simulation is ascertained, such as the radius of optical fiber, the membrane thickness, the size of membrane.

Published in:

Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on  (Volume:1 )

Date of Conference:

13-14 March 2010

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