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Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

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7 Author(s)
Wei Chen ; Department of Mechanical and Materials Engineering, Florida International University, Miami, USA ; Majid Beidaghi ; Varun Penmatsa ; Kevin Bechtold
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Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

Published in:

IEEE Transactions on Nanotechnology  (Volume:9 ,  Issue: 6 )