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Novel Capacitive Pressure Sensor

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2 Author(s)
Bakhoum, E.G. ; Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA ; Cheng, M.H.M.

A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ??F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ??m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic). The assembly constitutes a parallel-plate capacitor where the surface area of the electrodes is variable to a high degree. The mercury drop is pressured by a small corrugated metal diaphragm. As the electrode area of the parallel-plate capacitor varies, a total change in capacitance of more than 6 ??F is obtained.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 3 )