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Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

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5 Author(s)
Giner, J. ; Electron. Eng. Dept., Univ. Autonoma de Barcelona, Bellaterra, Spain ; Uranga, A. ; Torres, F. ; Marigo, E.
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The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26% MHz bandpass filter with a very low bandpass distortion (less than 0.1% dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM.

Published in:
Electronics Letters  (Volume:46 ,  Issue: 9 )

Date of Publication: April 29 2010

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