The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26% MHz bandpass filter with a very low bandpass distortion (less than 0.1% dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM.
Published in:
Electronics Letters
(Volume:46
,
Issue:
9
)
Date of Publication: April 29 2010