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Micromachined polysilicon microscanners for barcode readers

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4 Author(s)
Meng-Hsiung Kiang ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Solgaard, O. ; Muller, R.S. ; Lau, K.Y.

We describe the design and fabrication of micromachined resonant scanners that have large scan angles at fast scan speeds. Driven by an electrostatic combdrive actuator, these 200 μm×250 μm micromirrors have a maximum scan angle of 28/spl deg/ (optical) at a resonant frequency of 3 kHz when driven by a sinusoidal voltage of 9.5 V (amplitude) superimposed on a 30-V dc bias. Fabricated with a four-layer polysilicon-surface-micromachining process, these resonant scanners are compact, extremely light in weight, potentially very low in cost, and operate at very low power levels. Using the scanner as a laser-beam deflector, we have demonstrated a barcode reader system.

Published in:

Photonics Technology Letters, IEEE  (Volume:8 ,  Issue: 12 )