By Topic

Micromachined polysilicon microscanners for barcode readers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Meng-Hsiung Kiang ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; O. Solgaard ; R. S. Muller ; K. Y. Lau

We describe the design and fabrication of micromachined resonant scanners that have large scan angles at fast scan speeds. Driven by an electrostatic combdrive actuator, these 200 μm×250 μm micromirrors have a maximum scan angle of 28/spl deg/ (optical) at a resonant frequency of 3 kHz when driven by a sinusoidal voltage of 9.5 V (amplitude) superimposed on a 30-V dc bias. Fabricated with a four-layer polysilicon-surface-micromachining process, these resonant scanners are compact, extremely light in weight, potentially very low in cost, and operate at very low power levels. Using the scanner as a laser-beam deflector, we have demonstrated a barcode reader system.

Published in:

IEEE Photonics Technology Letters  (Volume:8 ,  Issue: 12 )