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The fabrication of submicron hexagonal arrays using multiple-exposure optical interferometry

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3 Author(s)
Kitson, S.C. ; Dept. of Phys., Exeter Univ., UK ; Barnes, W.L. ; Sambles, J.R.

We report on the use of multiple-exposure optical interferometry combined with nonlinear development of photoresist to enable the fabrication of hexagonal arrays of dots. The capability of the technique is demonstrated by the fabrication of a hexagonal array of 50-nm-radius dots having a 300-nm periodicity.

Published in:

Photonics Technology Letters, IEEE  (Volume:8 ,  Issue: 12 )