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MEMS orientational optomechanical media for microwave nonlinear applications

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3 Author(s)
Tsap, B. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Pister, K.S.J. ; Fetterman, H.R.

The fabrication and testing of orientational optomechanical media suitable for microwave phase conjugation is described. It consists of metal-coated dielectric elongated beams 1 mm×100 μm×10 μm suspended by nonconductive torsional springs attached to a microwave transparent frame. Rotation of single elements, in a polarized electromagnetic field at 15 GHz, was measured and found to be in a good agreement with theory. This first experimental implementation of using microelectromechanical structures (MEMS) for nonlinear microwave devices demonstrates the potential of an entirely new class of devices

Published in:

Microwave and Guided Wave Letters, IEEE  (Volume:6 ,  Issue: 12 )

Date of Publication:

Dec 1996

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