By Topic

Force Sensors Based on Screen-Printed Cantilevers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lakhmi, R. ; IMS Lab., Univ. of Bordeaux, Talence, France ; Debeda, H. ; Dufour, I. ; Lucat, C.

In this paper, the design, the fabrication, and the characterization of glass ceramic screen-printed force sensors are described. They are based on the use of cantilevers with integrated piezoresistors. The choice of the materials constituting the cantilever and the strain gauge, so as the dimensions of the cantilever have been optimized in order to measure forces in mN range. The sensors have been fabricated using the screen-printing technique associated with the sacrificial layer technique to release the freestanding part of the cantilevers. Afterwards, they have been characterized: measurement of sensitivity, reproducibility, and materials properties (Young's modulus and strain gauge factor). The performances of these sensors are compared to the existing silicon, polymer, and ceramic sensors.

Published in:

Sensors Journal, IEEE  (Volume:10 ,  Issue: 6 )