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The following topics are dealt with: MEMS fabrication; nanomaterials; nanodevices; electronics packaging; physical sensors; RF MEMS resonators; optical MEMS; biosensors; chemical sensors; medical sensors; microfluidic components; actuators; power MEMS; energy harvesting.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010