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Synthesis of graphene using Micro Chemical Vapor Deposition

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2 Author(s)
Qin Zhou ; Dept. of Mech. Eng., Univ. of California, Berkeley, CA, USA ; Liwei Lin

Large area synthesis of graphene has been realized on top of a nickel-coated micro platform using the Micro Chemical Vapor Deposition (Micro-CVD) system. The capability of ultra-fast heating and cooling provided by the MEMS platform is crucial for the controlled growth of graphene. Theoretical analysis shows that cooling rate is about 4 orders of magnitude higher than the conventional CVD system. Experimentally, 1~2 layers of graphene structures have been consistently synthesized as confirmed by Raman spectroscopy on the whole 300 × 300 ¿m2 platform. As such, this approach opens up a new class of opportunity in graphene synthesis.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010