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Tunable Electromechanical resonator based on Carbon Nanotube Array Suspended Gate Field Effect Transistor (CNT-SGFET)

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9 Author(s)
Arun, A. ; NanoLab, Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland ; Goffman, M.F. ; Grogg, D. ; Filoramo, A.
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In this paper we report the first experimental demonstration of Micro-Electro-Mechanical resonator based on a Carbon Nanotube-Array-Suspended-Gate-Field-Effect-Transistor (CNT-SGFET). A dense array of single-walled CNT aligned by ac-dielectrophoresis technique forms the suspended gate electrode of a conventional silicon based FET. Resonance frequency of 120 MHz is reported. An equivalent electrical model has been developed for the resonator.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010