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Fabrication of carbon nanomechanical resonators with embedded single walled carbon nanotube stiffening layers

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5 Author(s)
Seung Hoon Lee ; Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea ; Bumki Min ; Se Il Park ; Kwang-Cheol Lee
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This study presents a new fabrication method for high frequency nanomechanical resonators by utilizing carbon layers with embedded single walled carbon-nanotube layers. The carbon layers, fabricated by pyrolysis of photo- or electron beam resists, showed low-density and moderate Young's modulus which is suitable to sensitive nanodevices. The carbon-nanotube layers underneath carbon layers enhanced conductivity and Young's modulus while maintaining low-density of carbon nanoresonators. These two layers are fashioned into doubly clamped nanomechanical beams by electron beam lithography and carbon dry etching processes. Dynamic behaviors such as resonant frequency and Q-factor are investigated using magnetomotive detection method.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010