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A novel approach for the fabrication of all-polymer microfluidic devices

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5 Author(s)
Kalkandjiev, K. ; IMTEK, Univ. of Freiburg, Freiburg, Germany ; Gutzweiler, L. ; Welsche, M. ; Zengerle, Roland
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This paper describes a process sequence for the fabrication of all-polymer microfluidic chips based on the multilayer lamination of TMMF dry resist (TOK, Japan) on a pre-patterned PMMA substrate. The sequence provides a simple way to meet major microfluidic requirements like the fabrication of embedded microchannels, nozzles and interconnecting vias as well as their accurate integration into a chip-interface without additional materials and bonding procedures. We demonstrate the applicability of the sequence by manufacturing and testing a 24-channel TopSpot printhead. Additionally, non-cytotoxicity of TMMF was confirmed in cell culture experiments and different methods for surface modification were investigated.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010