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Efficient internal electrostatic transduction of the 41st radial mode of a ring resonator

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4 Author(s)
M. Ziaei-Moayyed ; Stanford University, Stanford, California, USA ; E. P. Quévy ; J. Hsieh ; R. T. Howe

This paper reports internal electrostatic transduction of the 41st radial bulk-mode of a ring resonator at 2.75 GHz with a quality factor of 7200 in air. The transducer electrodes are integrated within the vibrating structure in a dense serpentine pattern and strategically placed on the nodal lines to excite the 41st order bulk radial mode. The serpentine dielectric transduction results in a low motional resistance of 475 ¿¿ detected by direct two-port measurements. This resonator is fabricated by a double nanogap process, where 30 nm Si3N4 sidewall layers are formed using a combination of optically defined trenches and deposition of a high-¿¿ dielectric followed by a doped polysilicon layer.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010