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High-temperature battery-free wireless microwave acoustic resonator sensor system

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4 Author(s)
Canabal, A. ; Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA ; Davulis, P.M. ; Harris, G.M. ; Pereira da Cunha, M.

A novel and simple frequency-domain wireless interrogation method for surface acoustic wave (SAW) resonator sensors operating up to 850??C is presented. The method is based on directly measuring the scattering parameter S11 with a frequency-swept interrogating signal and extracting the group delay. Multiple resonators can be simultaneously addressed by frequency multiplexing the resonator responses. A new high-temperature SAW resonator capable of operating up to 1000??C has been used as a temperature sensor. The design uses the newly developed high-temperature Pt/Rh/ZrO2 thin-film electrodes and open-circuit gratings on langasite (LGS, La3Ga5SiO14). Reported is the first successful operation of a wireless SAW resonator at temperatures up to 850??C. The SAW resonator was exposed multiple times to 850??C, providing consistent performance.

Published in:

Electronics Letters  (Volume:46 ,  Issue: 7 )