By Topic

LGS as a crystal for MEMS. Micromachining in HCl∶H2O. Anisotropy, database and simulations

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
C. R. Tellier ; Time and Frequency Department, Institute FEMTO-ST, Besançon, France ; M. Akil ; T. G. Leblois

This paper focuses on the complete characterization of the wet micromachining of 3D microstructures on LGS plates. Circular and square membranes and mesas are etched at 80¿¿C in a HCl:H2O solution of composition 2:1. The anisotropy of the wet etching is found to be of type 2 with ¿¿square¿¿ membranes bounded partly by curved facets and by curved contours at corners. The database of the continuum simulation tool TENSOSIM is progressively adjusted. Accordingly numerical 3D etching shapes derived with the proposed database are very close to experimental shapes. The objective of an accurate adjustment of the database of the simulator TENSOSIM in order to build an efficient tool for the CAD of LGS resonant structures is thus reached.

Published in:

2009 IEEE International Ultrasonics Symposium

Date of Conference:

20-23 Sept. 2009